Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry
نویسندگان
چکیده
In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.
منابع مشابه
Low-Coherence Reflectometry for Refractive Index Measurements of Cells in Micro-Capillaries
The refractive index of cells provides insights into their composition, organization and function. Moreover, a good knowledge of the cell refractive index would allow an improvement of optical cytometric and diagnostic systems. Although interferometric techniques undoubtedly represent a good solution for quantifying optical path variation, obtaining the refractive index of a population of cells...
متن کاملPolarization-Independent Optical Low-Coherence Reflectometry with a Non-Birefringent Arrayed- Waveguide Grating
The polarization dependency of an arrayed-waveguide grating (AWG) in an optical low-coherence reflectometry system is investigated. For mixed polarization, signal fading is observed at specific depths. This fading is eliminated by using a nonbirefringent AWG. Keywords-arrayed waveguide grating; Non-Birefringent waveguides; Optical Low-coherence Reflectometry
متن کاملDynamic and Static Pull-in instability of electrostatically actuated nano/micro membranes under the effects of Casimir force and squeezed film damping
In the current study, the effects of Casimir force and squeeze film damping on pull-in instability and dynamic behavior of electrostatically actuated nano and micro electromechanical systems are investigated separately. Linear elastic membrane theory is used to model the static and dynamic behavior of the system for strip, annular and disk geometries. Squeeze film damping is modeled using nonli...
متن کاملImplementation of an All-Fiber Variable Optical Delay Line with a Pair of Linearly Chirped Fiber Bragg Gratings
We implemented all-fiber delay line using linearly chirped fiber Bragg gratings (CFBG), which can be applicable for reflectometry or optical coherence tomography (OCT). Compared with the previously reported delay lines, the proposed fiber-based optical delay line has in principle novel advantages such as automatic dispersion cancellations without additional treatment and a gain in optical delay...
متن کاملطراحی، ساخت و مشخصه یابی پله های فازی شیشه ای برای کاربرد در تداخل سنجی جابجایی فاز
In this paper, we report on the design and fabrication of a low-cost phase shifter for application in phase shifting interferometry. Phase shifting interferometry is a powerful method for surface characterization. It uses interference data recorded during a series of predetermined phase shifts to recover the induced phase by the object surface. These controlled phase shifts are typically perfor...
متن کامل